反置结构ZnO微米级圆晶的制备和性能研究

Fabrication and Performances of Inverted Structure ZnO Micro Die

利用全自动化功能磁控溅射技术在硅/PS(聚苯乙烯)胶体球模板上制备了具有室温铁磁性和紫外发光特性的两种ZnO微米级圆晶。采用SEM、XRD、PL和VSM对样品进行了表征。结果表明:在PS胶体球去除方法上采用略有不同工艺制备的六边形和反置六边形结构ZnO微米级圆晶均具有(002)择优取向,晶粒大小分别为21.7nm和26.5nm,应力分别为3.26×109 Pa和-1.21×109 Pa,均出现361nm和444nm两个发光峰。两种结构ZnO阵列的铁磁性有所不同,可能是缺陷不同引起的。

Two kinds of inverted structures zinc oxide micro dies with both RT ferromagnetism and ultraviolet luminescence were fabricated on Si/polystyrene colloidal templates by full-auto RF magnetron sputtering technology. The ZnO samples were characterized by SEM, XRD, PL and VSM. The results shows that hexagonal structure and inverted hexagonal structure ZnO micro dies with （002） orientation were obtained by different processes in polystyrene etching, grain size of （002） plane was 21.7 nm and 26.5 nm, while the stress was 3.26×10^9 Pa and --1.21×10^9 Pa respectively. Meanwhile, about 361 nm and 444 nm luminescence peaks appeared in the two samples. The ferromagnetic properties are different in the two types structure ZnO micro dies, this perhaps owes to the deficiency variance.