应用于高性能光学薄膜表征的光热光声检测技术

Optical-thermal and optical-acoustics detecting techniques applied for the characterizations of high performance optical thin films

本文介绍了光热与光声探测技术的基本原理,结合光学薄膜的吸收测试、光学薄膜的激光辐照特性表征、激光损伤特性表征以及光学薄膜的机械性质表征等各种具体应用,对激光量热法、光热偏转法、表面声波法等典型的光热、光声检测方法进行了分析;阐述了这些方法的测试原理以及各自优势与不足。介绍了该领域利用这些方法取得的一些成果,并就光声光热检测技术的发展趋势做了展望。

In this paper , the basic principle of the optical-thermal and optical-acoustics detecting methods is reviewed.The common optical-thermal and optical-acoustics detecting methods are described .Combined with specific applications such as absorption test of optical films , characterization of laser irradiation and laser dam-age to the thin films and characterization of the mechanical properties of thin films , some typical detecting methods are analyzed including laser calorimetry technique , photothermal deflection technique , surface acous-tic waves and so on .The advantages and disadvantages of these methods are indicated .Finally, some achieve-ment in the field by these methods are summarized , and the prospect of these methods is presented .