基于氧化物的0.8～1.7μm和3.7～4.8μm硬质宽带红外增透膜研制

Fabrication of hard infrared anti-reflection coating with broadband in the wavelength of 0.8-1.7 μm and 3.7-4.8 μm based on oxide material

从实际应用出发，在0°入射的条件下，在ZnS基底上针对0.8～1.7μm和3.7～4.8μm两个红外波段，设计并制备了双波段红外增透膜。论述了材料选择、膜系设计和制备方法，最终使用等离子辅助沉积技术在ZnS窗口上制备出双波段红外增透膜，透过率及环境测试结果表明：在0.8～1.7μm波段双面平均透过率大于95％，在3.7～4.8μm波段双面平均透过率大于96％。膜层结合牢固并有良好的耐摩擦性能。

This paper demonstrates the design and fabrication of the dual-band antireflection coating in 0.8-1.7 μm and 3.7-4.8μm wavelength region at 0 °incident angle on the ZnS substrate based on oxide materi-als.The choosing on evaporation materials , optical coating design and fabrication method , et al.are discussed in detail .The dual-band IR antireflection coating has been successfully produced by Plasma Ion Assisted Dep-osition（ PIAD） technique on both side of the ZnS substrate .Transmittance and environment test results show that the average transmittance is larger than 95%during 0.8-1.6μm wavelength region and larger than 96%during 3.7-4.8 μm wavelength region , respectively .The firm adhesion and good tribology ability have been obtained referring to the general specification for optical coatings .