摘要
从实际应用出发,在0°入射的条件下,在ZnS基底上针对0.8~1.7μm和3.7~4.8μm两个红外波段,设计并制备了双波段红外增透膜。论述了材料选择、膜系设计和制备方法,最终使用等离子辅助沉积技术在ZnS窗口上制备出双波段红外增透膜,透过率及环境测试结果表明:在0.8~1.7μm波段双面平均透过率大于95%,在3.7~4.8μm波段双面平均透过率大于96%。膜层结合牢固并有良好的耐摩擦性能。
This paper demonstrates the design and fabrication of the dual-band antireflection coating in 0.8-1.7 μm and 3.7-4.8μm wavelength region at 0 °incident angle on the ZnS substrate based on oxide materi-als.The choosing on evaporation materials , optical coating design and fabrication method , et al.are discussed in detail .The dual-band IR antireflection coating has been successfully produced by Plasma Ion Assisted Dep-osition( PIAD) technique on both side of the ZnS substrate .Transmittance and environment test results show that the average transmittance is larger than 95%during 0.8-1.6μm wavelength region and larger than 96%during 3.7-4.8 μm wavelength region , respectively .The firm adhesion and good tribology ability have been obtained referring to the general specification for optical coatings .
出处
《中国光学》
EI
CAS
2014年第5期816-822,共7页
Chinese Optics
基金
国家自然科学基金资助项目(No.60478035)
关键词
红外增透膜
硫化锌
等离子辅助
双波段增透膜
IR antireflection coating ZnS Plasma Ion Assisted Deposition ( PIAD) dual-band antireflection coating