层厚比对磁控溅射Cr/CrN多层涂层组织和性能的影响

Effect of Layer Thickness Ratio on Microstructure and Properties of Magnetron Sputtered Cr/CrN Multilayer Coatings

在超高真空磁控溅射仪上,制备了一系列具有相同调制周期不同层厚比的Cr/CrN涂层。用X射线衍射仪分析了涂层的相组成,通过扫描电镜观察了涂层形貌,采用显微硬度计测试了涂层硬度,在划痕仪上确定涂层和基体间的结合力,并利用磨损仪测量涂层的摩擦磨损性能。结果表明:调制周期为400nm时,当层厚比由2.0减小到0.2,Cr/CrN多层涂层始终由Cr和CrN两相组成,涂层择优取向为CrN(200),且涂层变得愈加致密,硬度从1550HV增大到2300HV,磨损率从2.4×10-8 mm3·N-1·m-1减小为0.6×10-8 mm3·N-1·m-1,涂层和基体结合性能优良。

A series of Cr/CrN multilayer coatings with different layer thickness ratio under the same modulation cycle were prepared by ultrahigh vacuum magnetron sputtering. The phase composition, microstructure, hardness, adhesion, and tribological performance of the coatings were analyzed by XRD, SEM, microhardness tester, scratch tester, and abrasion tester, respectively. The results show that under the modulation cycle of 400 nm, when layer thickness ratio is decreased from 2.0 to 0.2, Cr/CrN multilayer coatings are always composed of two phases Cr and CrN, and the preferred orientation remains at CrN (200), and also the coatings become more and more dense, the coating hardness is increased from 1550 HV to 2300 HV, and wear rate is decreased from 2.4×10-8mm3·N-1·m-1 to 0.6×10-8mm3·N-1·m-1, Cr/CrN multilayer coatings have good adhesion properties.