摘要
从工艺需求、成本、工期与污染控制的角度出发,检视目前面板厂建厂的设计概念后,提出另外一种LTPS建厂设计的提案构想,以为业界参考。
After reviewing the prevalent design concept of new FPD construction and starting from the standpoints of requirement of process, cost, schedule and contamination control, another design proposal is proposed for new LTPS FPD plant construction for industrial application reference.
出处
《洁净与空调技术》
2014年第3期42-45,共4页
Contamination Control & Air-Conditioning Technology
