基于ExtendSim的单晶硅生产线仿真研究

Research on MonocrystallineSiliconProduction Line SimulationBased on ExtendSim

针对单晶硅生产线生产工艺和生产工序之间的复杂性问题,研究了离散事件仿真方法,构建了单晶硅生产线仿真模型的评价分析指标体系,采用ECRS原则对某单晶硅生产线进行了无删减的生产简化,利用ExtendSim软件,采用层级仿真建模法,对该单晶硅生产线进行了仿真。仿真结果表明该单晶硅生产线仿真是符合现行生产方式的,完整全面地反映了现实生产情况,所建立的指标体系对仿真结果的评价分析是可信的,通过指标体系分析,发现了该单晶硅生产线存在的问题。

According to the complexity problem between monocrystalline silicon production line production process and production process, studies the discrete event simulation method, constructed the evaluation of monocrystalline silicon production line simulation model analysis index system, using the ECRS principle was simplified production no cut of a monocrystalline silicon production line, using the ExtendSim software, using hierarchical simulation modeling method,the the monocrystalline silicon production line simulation. The simulation results show that the monocrystalline silicon production line simulation is consistent with the prevailing mode of production, a complete picture of the real production situation, the evaluation index system established by the analysis of simulation result is credible, through the analysis of index system, finds the existing problems of the production line of the single crystal silicon.