红外热像仪微扫组件的模态分析

A modal analysis of the infrared thermal imager micro components

研究红外热像仪的集成式压电驱动两自由度微扫组件的动力学特性,使用基于理论分析和实验测试柔性铰链机构的两种方法,根据拉格朗日方程建立微扫组件的运动微分方程,推导出系统固有频率的解析式.采用有限元分析方法对微扫组件进行仿真分析,得到微扫组件有效工作的谐振频率和振型,并对微扫组件的模态频率进行了实验测试,对有限元计算的结果与实验结果的一致性进行对比分析.结果表明,其理论分析正确,数值分析可靠.

This paper studies the dynamic characteristics of 2 DoF （Degree of Freedom） micro scanning components driven by infrared thermal imager integrated piezoelectric. Using this method, the micro displacement of the piezoelectric ceramic is magnified. This paper adopts the flexible hinge mechanism based on the theoretical analysis and experimental tests. According to the Lagrange equation based mi- cro scanning components differential kinetics equations, the natural frequency of the system is de- duced. Finite element analysis method is employed for micro scanning components simulation analyses. The effective resonance frequency and vibration model of micro scanning components are obtained. The experimental tests for the modal frequency of the micro components are conducted. After mathematical analysis, the results of finite element calculation have compared with the experimental results. The re- sults verify that the theoretical analysis iscorrect and the numerical analysis is reliable.