纳米多孔氧化铝膜的制备与结构表征

Preparation and Structure Characterization of Nano Porous Alumina Membrane

采用二次阳极氧化法,以草酸为电解液,制备纳米多孔氧化铝膜。利用扫描电镜、原子力显微镜和X射线衍射仪对氧化铝薄膜的微观形貌和相组成进行了表征,研究了二次阳极氧化法制备纳米多孔氧化铝膜的过程和成膜机理。结果表明:二次阳极氧化制备的纳米多孔氧化铝膜为非定型态,所得孔洞排列规则且分布均匀,平均孔径约为29 nm,孔密度为1.74×1010个/cm2。纳米多孔氧化铝膜的形成经历了阻挡层形成、微孔层形成和多孔层形成与长大等阶段。

The nano-porous alumina membrane was prepared with the method of the two-step anodic oxidation in the oxalic solution. The morphology of the membrane was characterized by high magnification scanning microscope, atomic force microscope and XRD. The formation and mechanism of the nano-porous alumina membrance prepared with the method of the two-step anodic oxidation were studied. The results show that a regular and homogeneous nano-porous aluminum membrane with the pore size of 29 nm and the pore density of 1.74×1010/cm2 is obtained successfully. The membrane is composed of amorphous aluminum. The change of anodic current during the anodic oxidation reveal that the mechanism of nano-porous formation of aluminum undergoes the formation of barrier layer, the formation of micro-pores and the formation and growth of final nano-pores.