新型混合式集成光学陀螺系统(英文)

New hybrid integrated resonant optical gyroscope

提出了一种混合式集成光学陀螺系统结构。所有的无源光学器件在单一硅片上进行加工。光源和探测器等有源器件通过倒装焊的工艺进行键合。此种结构的主要优势是去除了外部的调制器,将陀螺系统的集成化提高到一个新水平。详细阐述了混合式集成光学陀螺的调制解调技术。系统的频率调节通过在激光器的输入电流上加载高频方波来实现。当陀螺旋转时,谐振腔内传输的两路光分离,输出呈方波形式,通过检测方波信号可以得到角速度的值。该研究对集成光学陀螺系统的研究有较大贡献。

A new hybrid integrated resonant optical gyroscope was presented. All the passive optical elements were fabricated on a single silicon substrate. The active part, which concludes only the laser and photodetectors, was mounted to the waveguide with flip-flop process. The main advantage of the construction was removing the external modulator, and it brings the integration to a new level. For the proposed hybrid integrated optical gyro, an alternative modulation/demodulation method was described in detail. High frequency square waveform modulation wave was assigned to the injection current port of the laser to obtain the frequency modulation. When the gyro rotates, the resonator curve of the two directions departs, resulting in square-wave output, which can be detected to obtain the angular velocity. This work has a big contribution to the integrated optical gyro system.