薄膜材料杨氏模量测量方法的研究进展

Research Progresses of Young's Modulus Measurement Method of Thin Film Materials

基于国内外薄膜材料杨氏模量测试的最新研究进展,系统地综述了近年来薄膜材料杨氏模量的测量方法,包括共振法、纳米压痕法、动态膨胀法以及视觉图像跟踪系统与微拉伸复合法等,并对这些测试方法的基本原理、研究现状及存在的问题做了简要介绍。在这些方法中纳米压痕法和共振法是相对准确而且普及的测量方法。当薄膜厚度减小到纳米量级时,纳米压痕法将达到测试的极限。共振法对于器件的加工工艺有一定的依赖,但辅以其他相关纠正技术将来有望成为测试纳米级薄膜杨氏模量的标准方法。

Based on the latest research progresses of Young＇s modulus measurement of thin films at home and abroad,the measurement methods of Young＇s modulus of thin films are systematically summarized,including the resonance method,nanoindentation method,dynamic expansion method,visual image tracking system and micro tensile test method.The basic principle,research status and existing problems of these measurement methods are introduced briefly.Among these methods,the nanoindentation method and resonance method are relatively accurate and universal.When the film thickness decreases to the nanometer level,the nanoindentation method will reach the detection limit.To some extent,the resonance method is influenced by the fabrication process of devices,but it is expected to be the standard test method of Young＇s modulus in nanometer thin films in the future with some related correcting technologies.