摘要
采用直流磁控溅射方法在玻璃基片上制备了不同Fe掺杂量的TiO2薄膜,并对薄膜分别在空气和真空氛围下500℃进行30min退火处理。研究了Fe掺杂量和退火氛围对TiO2薄膜的结晶状态、表面形貌和磁性能的影响。结果表明,真空中500℃下退火的Fe掺杂的TiO2薄膜表现为非晶态结构,没有观察到室温铁磁性能的出现,而空气中500℃退火的样品显示出良好的结晶状态,且所有掺杂的样品均显示出室温铁磁性,并且随着Fe掺杂量的增加,TiO2薄膜的晶体结构逐渐由锐钛矿相向金红石相转变。
Fe doped TiO2 thin films were fabricated on the glass substrates by DC magnetron sputtering, and were annealed in air and vacuum at 500℃ for 30rain, respectively. The effects of Fe content and annealing atmosphere on the crystallization, the morphology and magnetism of TiO2 thin films were investigated. The results show that the Fe doped TiO2 thin films annealed in vacuum at 500℃ exhibit a amorphous structure, and no room temperature ferromagnetism is observed, but the samples annealed in air show good crystallization, and room temperature ferromagnetism is observed in all samples. With the increasing of Fe doping, the structure of the TiO2 thin films is changed from anatase to rutile.
出处
《材料工程》
EI
CAS
CSCD
北大核心
2014年第10期101-105,共5页
Journal of Materials Engineering
基金
河北省自然科学基金(A2012101001)
河北省科技支撑计划项目(132176278)
河北省承德市财政扶持项目(CZ2012007)
河北省教育厅自然科学研究青年基金(QN20132013)
关键词
稀磁半导体
晶体结构
铁磁性
退火氛围
diluted magnetic semiconductor
crystal structure
ferromagnetism
annealing atmosphere
