脉冲激光烧蚀铕粒子速度劈裂的蒙特卡罗模拟

Monte Carlo simulation of velocity splitting of europium ions produced by pulsed laser ablation

采用蒙特卡罗方法,模拟了烧蚀铕粒子输运动力学过程,得到了铕粒子电流随时空演化曲线,模拟结果与实验数据符合较好.探讨了环境气体压强对速度劈裂的影响,研究结果表明,环境气体压强对速度劈裂有较明显的影响.当靶-衬间距为60 mm时,铕粒子速度劈裂的范围为10～220 Pa;当环境气体压强为120 Pa时,速度劈裂现象最明显,烧蚀粒子的质量对速度劈裂的压强范围起决定性作用.

The velocity splitting of europium ions is simulated by Monte Carlo method.The transport process of the europium ions in different position of the current changing with time is simulated,the results coincide well with the experiment data.At the same time the influence of pressure on velocity splitting is studied.The results show that the environment pressure has a significant effect on velocity splitting.When the distance of the target and the substrate is 60 mm,the pressure range of the velocity splitting is between 10-220 Pa,at 120 Pa or so the velocity splitting is the most obviously,the quality of ablation particles play a decisive role for pressure range of velocity splitting.