摘要
采用传统方法抛光高精度非球面时,多次面形误差补偿耗费时间占其抛光总时间的80%以上,严重影响非球面的加工效率。根据非球面的面形误差补偿原理,进行抛光非球面面形误差补偿的工艺实验。采用LOH-data-correct软件对非球面进行计算,并修正补偿其面形,可减少面形修正次数,降低成本,提高加工效率。
When the traditional method is used consumption of surface-shape error compensation for polishing high-precision aspheric surface, the time is more than 80% of the total polishing time. The efficiency of aspheric surface machining is severely affected. According to the principle of compensation for aspherical surface-shape error, process experiments of error compensation of polishing surface figure is conducted. By calculation and compensation of aspherical surface-shape using the software LOH-data-correct, the times of surface-shape correction and the cost are reduced, the machining efficiency is improved.
出处
《激光与光电子学进展》
CSCD
北大核心
2014年第10期172-176,共5页
Laser & Optoelectronics Progress
关键词
光学制造
抛光
非球面
面形误差
补偿技术
optical fabrication
polishing
aspheric surface
surface-shape error
compensation technology