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数控抛光非球面面形误差补偿技术研究 被引量:1

Research on Compensation of Computer Controlled Polishing Aspheric Surface-Shape Error
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摘要 采用传统方法抛光高精度非球面时,多次面形误差补偿耗费时间占其抛光总时间的80%以上,严重影响非球面的加工效率。根据非球面的面形误差补偿原理,进行抛光非球面面形误差补偿的工艺实验。采用LOH-data-correct软件对非球面进行计算,并修正补偿其面形,可减少面形修正次数,降低成本,提高加工效率。 When the traditional method is used consumption of surface-shape error compensation for polishing high-precision aspheric surface, the time is more than 80% of the total polishing time. The efficiency of aspheric surface machining is severely affected. According to the principle of compensation for aspherical surface-shape error, process experiments of error compensation of polishing surface figure is conducted. By calculation and compensation of aspherical surface-shape using the software LOH-data-correct, the times of surface-shape correction and the cost are reduced, the machining efficiency is improved.
作者 徐海华
出处 《激光与光电子学进展》 CSCD 北大核心 2014年第10期172-176,共5页 Laser & Optoelectronics Progress
关键词 光学制造 抛光 非球面 面形误差 补偿技术 optical fabrication polishing aspheric surface surface-shape error compensation technology
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