绝缘表面液膜检测电容传感器的几何参数研究

Research on Geometric Parameter of the Capacitive Sensor fbr Liquid Membrane Detection on the Insulator Surface

设计了多螺旋盘形相邻电容传感器，并分析了传感器几何参数设计对其测量性能的影响。与传统的阵列式、多环式相邻电容传感器在同等测量环境下进行测量，对各相邻电容传感器分别进行电场分布仿真和边缘电容测量值测量，并进行比较分析，确定了包括极板间距、面积与形状等传感器几何参数传感器性能的具体影响。实验结果表明，复杂传感器结构能够提高电容传感器的测量线性度、测量信号强度以及测量灵敏度等性能。

A multi-pitch proximity capacitance sensor is proposed to improve the sensor performance, and the relation between the geometric parameters design of the sensor and the sensor performance is discussed. Compared to those traditional sensor geometries, such as array-based sensor, multi-ring based sensor, under tile same measurement conditions, the multi-pitch based sensor＇s electrical field distributions and the practical capacitance values are presented. The detail effects of the sensor design parameters, such as gaps between the sensor electrodes, the effective area and the geometry of the sensor plates are qualitative analysis. The experimental results prove that the complex structure sensor can improve the measurement linearity, signal strength and measurement sensitivity.