二维解耦微位移工作台的设计与有限元分析

Design and Finite Element Analysis of Two-Dimension Decoupling Micro-Displacement Worktable

微位移工作台在微机电系统、超精密加工和生物医学工程等领域有广泛的应用。设计了一种驱动器浮动的二维解耦微位移工作台。工作台采用双层柔性铰链杆对称一体化结构,消除了X、Y方向的耦合运动。推导了微位移工作台的理论刚度。为了验证此微位移工作台能够满足设计要求,采用有限元方法进行分析计算,有限元计算得到的微位移工作台刚度与微位移工作台的理论刚度吻合较好,并且通过有限元计算的结果验证了工作台在X、Y方向的运动无耦合。

Micro-displacement worktable has extensive application in micro-electro-mechanism system, ultra-precision machining, biomedical engineering and other fields. A kind of two-dimension decoupling micro-displacement worktable with floating actuator is designed. This worktable uses double-layer flexible hinges symmetry integration structure ,and eliminates coupling movement of X, Y direction. The theory stiffness of this micro-displacement worktable is deduced. In order to test and verify this micro-displacement worktable that can achive design requirements, the finite element analysis method is utilized. The calculated results are in good agreement with the deduced results, and verifies X, Y direction of the worktable without coupling movement.