摘要
设计了一种新型差分式大量程MEMS加速度计,实现了面内大过载信号的测试。首先利用MATLAB软件结合理论原理,设计了具体的结构参数,利用ANSYS有限元分析软件验证了结构设计的合理性。将本差分式MEMS面内加速度计结构用于集成三轴传感器,3个敏感质量块可以分别感应3个方向的加速度而不会相互影响,可以有效解决传感器体积大以及轴间交叉干扰的难题。
A new kind of large range MEMS accelerometer, which can measure high overload was designed. The structural parameters were calculated by MATLAB,and the reliability of the structure was verified by ANSYS. This kind of MEMS accelerometer can be used on triaxial accelerometer device,with the advantage of mutual isolation. This can effectively solve the problem of big volume and Cross-interference between the axes.
出处
《传感技术学报》
CAS
CSCD
北大核心
2014年第7期893-897,共5页
Chinese Journal of Sensors and Actuators
基金
国家"十二五"装备预研项目
关键词
差分式
面内加速度计
高量程
MEMS
differential
MEMS
in-plane accelerometer
large range
