沿面介质阻挡放电等离子体特性参数的仿真计算

Simulation Calculation of Characteristic Parameters of Surface Dielectric Barrier Discharge

为了深入理解沿面介质阻挡放电(SDBD)的放电机理,揭示其产生等离子体的特性参数的演化规律,基于放电的物理过程和实验结果,以非对称结构SDBD发生器为研究对象,建立了其集总参数等效电路模型。首先参照高速相机拍摄的放电图像,估测了等离子体几何尺寸与电压幅值的关系曲线,借助Matlab/Simulink软件,联立Boltzmann方程求解器,求解基尔霍夫电压方程、电子连续性方程,得到电流、电子数密度、电子温度、等离子体电阻、气隙电压、介质表面电压等等离子体特性参数随时间的变化关系,并进一步计算了电子数密度、电子温度、电阻、容抗随电流密度的变化规律。结果表明:随着电流密度的增加,电子数密度和电子温度增大,等离子体电阻和容抗则非线性减小。研究结果可供深入分析激励器放电特性、实现阻抗匹配、提高等离子体发生器效率参考。

In order to further understand the mechanism of surface dielectric barrier discharge （SDBD） and illustrate re-gularity of the characteristic parameters of SDBD plasma, we established an equivalent circuit of asymmetric SDBDplasma generator based on the physical process of the discharge and some experimental results. Firstly, we derived arelationship curve between the plasma geometry and the voltage amplitude from images captured by high-speed camera.Then, using Matlab/Simulink as well as the Boltzmarm equation solver, we solved the Kirchhoff＇s voltage equation andthe electron continuity equation to calculate some characteristic plasma parameters, including current, electron density,electron temperature, plasma resistance, voltage drop across the discharge gap, and surface voltage of dielectric, etc, andhence obtained the influence of current density on these discharge parameters. It is shown with increasing current density,electron density and electron temperature increase but plasma impedance and plasma capacitance decrease non-linearly.The results can be used as a reference for fiarther analyzing the discharge characteristics of the reactor, realizingimpedance matching circuit, and improving the efficiency of plasma actuator.