关于光学表面微观轮廓粗糙度标准的探讨

On Measure Standard and Testing Method for Roughness of Surface Texture of Optical Elements

讨论提出了光学超光滑表面微观轮廓纳米及亚纳米计量标准问题,指出,现有的GB/T 1031-2009粗糙度数值标准不能满足光学表面微观轮廓的纳米及亚纳米计量要求。为此,建议制订新的专用的光学表面粗糙度标准,以适应现代光学快速发展的需求。

The measure standard on roughness of surface texture of optical elements for nanometer and subnanometer-grade is presented in the paper. It is indicated requiment for surface texture of optical elements on nano-and subnanometer grade no using surface roughness standard GB /T 1031-2009. It is suggested,formulating a professional standard for optical surface roughness is required adapting to needs for rapidly development of modern optics.