三(2,2,6,6-四甲基-3,5-庚二酮)酸钌(Ⅲ)的合成及性质

Synthesis and Characterization of Tris(2,2,6,6-tetramethyl-3,5-heptanedionato) Ruthenium(Ⅲ)

以三氯化钌和2,2,6,6-四甲基-3,5-庚二酮为原料,在甲醇中合成了β-二酮前驱体—三(2,2,6,6-四甲基-3,5-庚二酮)酸钌(Ⅲ)。通过元素分析、红外光谱、核磁共振谱、紫外-可见光谱等对其进行了表征,确定了配合物的结构组成。采用TG-DTA分析了配合物在空气和氮气中的热分解行为,为MOCVD镀钌和钌的氧化物薄膜工艺提供热力学数据与参考。

A precursor, tris（2,2,6,6-tetramethyl-3,5-heptanedionato） ruthenium（Ru（thd）3） was synthesized from RuCl3 and Hthd in methanol. The structure of Ru（thd）3 was characterized by element analysis, infrared spectroscopy, NMR spectroscopy and UV-vis spectrum. The thermal decomposition behavior was studied by TG-DTA analysis under air and nitrogen. The results provided the thermodynamic data and reference for preparing ruthenium and ruthenium oxide thin film by MOCVD from Ru（thd）3.