基于SCIE的原子层沉积文献计量学研究

Bibliometric Analysis on ALD(Atomic Layer Deposition)Based on SCIE

采用文献计量方法,从年代分布、国家/地区分布、文献类型分布、期刊分布、机构分布、学科分布、引文情况等方面,对SCIE中收录的近10年来关于原子层沉积的研究文献进行了统计分析,以期了解世界各国在这一研究领域的进展情况,为专业研究人员提供信息参考。

By using bibliometric method, this paper makes a statistical analysis on the research literatures about ALD collected by SCI Expanded （SCIE） in recent ten years from aspects of years distribution, nations/regions distribution, document types distribution, periodicals distribution, organizations distribution, subjects distribution, and citations, etc., in order to understand the progress of various countries in the world in this research field and to provide information reference for professional researchers.