面阵CCD光谱响应测试及不确定度评估

Spectral Response Testing and Uncertainty Evaluation of Plane Array CCD

基于单色仪法对面阵CCD进行光谱响应测试,并对测试结果的不确定度进行全面评估。介绍单色仪法测试CCD光谱响应的原理;选用硅陷阱探测器作为标准探测器,搭建测试装置,得出400-1000 nm波段内面阵CCD光谱特性参量,其中峰值波长为602 nm,中心波长为580 nm,光谱带宽为402 nm;以632 nm处光谱响应测试为例,建立不确定度评估模型,分析了包括面阵CCD辐照度响应非均匀性、溴钨灯稳定性、单色仪出射波长重复性和准确度以及图像采集处理系统的稳定性对测试的影响。应用模型计算得出测试结果的合成标准不确定度为4.3%（k=1）,满足面阵CCD光谱响应测试精度要求。

Based on the method of monochromator, the spectral response of plane array CCD is tested and the uncertainty of the results is evaluated in all respects. The principle of the test method is introduced, a set of spectral testing device which uses the silicon trap as the standard detector is designed. Within the range of 400-1000 nm, the spectral characteristics of the plane array CCD is obtained, including the peak wavelength of 602 nm, the center wavelength of 580 nm and the spectral band wavelength of 402 nm. According to the spectral response at 632 nm,an uncertainty evaluation model is established to analyze all the factors that have impact on the test results, including the irradiance responsivity non- uniformity of plane array CCD, the stability of bromine tungsten lamp, the repeatability and accuracy of emitting wavelength of monochromator, as well as the stability of the image acquisition and processing system. According to the model, the combined standard uncertainty is 4.3%（k=1）, which can meet the requirement of spectral response testing accuracy of plane array CCD.