固结磨料研磨镁铝尖晶石的材料去除机理

Removal Mechanism of Lapping Magnesia Alumina Spinel Using Fixed Abrasive

研磨过程中机械去除作用与化学去除作用的有效分离是实现研磨过程可控调节及提高加工表面质量的前提。本文通过尖晶石在不同介质中的材料去除速率,对其在不同研磨液中化学与机械作用的材料去除率进行了分离和计算;采用微/纳压痕仪测量了不同研磨液作用下工件表面的显微硬度,依此分析了其软化层厚度。结果表明:研磨液对镁铝尖晶石工件具有一定的化学去除作用,研磨过程中材料去除以机械作用下的脆性去除为主;研磨液的化学作用主要体现在工件表面形成了一层软化层,其中乙二醇产生的软化层最厚,三乙醇胺最薄。

The effective separation of mechanical removal and chemical removal during lapping is the foundation to realize controllable lapping process and improving the surface quality.The mechanical and chemical functions during the material removal of different lapping slurries were separated and calculated by measuring the material removals during different mediums when fixed abrasive pad worked on spinel.Micro hardness of work piece surface during different lapping slurries were measured by nanoindentation,and the thickness of soft layers were analyzed.The research results indicate that there is some chemical corrosion with slurries in lapping spinel which could remove some material; the material removals in lapping spinel with different slurries are mainly brittle removal; the soft layers are formed by corrosion of lapping slurries; the soft layers producted by ethylene glycol are the thickest,and that producted by triethanolamine are the thinnest.