微弧氧化法制备磁性薄膜及其组成结构分析

Preparation of magnetic film by micro-arc oxidation method and its composition and structure analysis

以钛金属作衬底,FeSO4溶液为主要原料,采用微弧氧化法制备了磁性薄膜,薄膜的饱和磁化强度为77.7 A·m2/kg。探索了薄膜的形成工艺。运用IR、XRD、XPS和SEM等手段表征了磁性薄膜的组成和形貌,结果表明磁性薄膜主要由Fe3O4和(Fe2O3)x·2H2O晶体组成,表面比较光滑致密。简要推断了磁性薄膜的形成机理。

A magnetic film was prepared with FeSO4 solution as principal raw material on titanium alloy by mi- cro-arc oxidation method, specific saturation magnetization of the film was 77.7 A· m^2/kg. A formation tech- nology of the film was explored. The magnetic film was characterized by XRD, FT-IR, XPS and SEM etc, the results show that the magnetic film was primarily composed of Fe304 and （Fe203）x·2H20 crystals, and sur- face of the film was smooth and dense. Formation mechanism of the magnetic film was briefly deduced.