离子束改性先进陶瓷薄膜结构与力学性能的研究现状

Research Status of Structure and Mechanical Property of Advanced Ceramic Film Modified by Ion Beam

离子束改性技术在先进陶瓷材料方面的应用效果突出。在阐述离子束改性原理的基础上,综述了该技术在先进陶瓷薄膜材料微观结构与组织,力学性能和摩擦学性能方面的应用。离子束改性是一种高能高效的掺杂改性手段,在辅助制备高质量薄膜、改善薄膜力学和摩擦力学方面有着显著的优势。深入了解离子束与薄膜原子的作用机制,精确调配薄膜的微观结构和组成,降低成膜质量的不确定性,是未来离子束改性先进陶瓷薄膜的研究重点。

Excellent performance has been showed in advanced ceramic materials modified by ion beam implantation.Based on ion beam modification principle,application development in advanced ceramic film by this technology,ranging from microstructure and composition to mechanical and friction properties is reviewed.As a highly efficient doping method,ion beam implantation has a significant advantage in forming high quality films as well as in improvement of mechanical and tribological properties with assisted deposition technology.Future work should be deeply understanding interaction mechanism between ion beam and film atoms,precisely tailoring the microstructure and composition of films,and reducing uncertainty of films in manufacture process.