一种双环境力下的硅基MEMS执行器设计与分析

Design and Analysis of Si-Based MEMS Actuator under Dual Environment Forces

基于发射过程引信保险机构的工作原理,设计了一种应用于双环境力下的MEMS执行器,建立了执行器中可动部件的动力学模型,研究了影响执行器工作的因素.应用有限元法在ANSYS/LS-DYNA软件下对MEMS执行器进行动力学仿真分析,得到执行器可动部件的运动曲线和整体的应力云图.计算结果表明,该执行器在引信的后坐环境和离心环境下均能可靠执行动作,并且具有结构紧凑、质量轻的特点.

Based on the working principle of fuze safety mechanism in emission process,a kind of MEMS actuator applied in dual environment forces was designed. The dynamical model of the movable parts was established,and the main factors concerning the operation of the actuator were analyzed. The dynamic analysis of MEMS actuator was accomplished by finite element method in ANSYS / LS-DYNA,and the motion curves of the movable parts and the stress distribution nephogram of the whole actuator were obtained. The calculation results show that the MEMS actuator can work under the setback environment and centrifugal environment of fuze normally. The MEMS actuator is compact and light.