带状波导表面等离子激元的透射特性(英文) 被引量：1

Transmission Characteristics of Surface Plasmon Polariton Based on Strip Structure

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摘要为了深入探讨带状波导的表面等离子激元透射特性,采用衍射光栅耦合方式实现表面等离子激元激发,通过改变金属薄膜厚度和入射光角度,得到薄膜厚度、入射光角度与透射率的变化特性.结果表明:金属薄膜厚度的减少会导致透射带宽迅速降低,同时透射率也随之降低;而入射光角度的改变导致透射光效率的变化.这一研究对于半导体设备的纳米等离子激元耦合具有一定的意义. In order to depth study transmission characteristics of surface plasmon polariton based on strip structure,surface plasmon polariton excitation was achieved by using grating coupling.The transmission characteristics which is relation to film thickness and incident angle were obtained though adopting to change he metal film thickness and angle of incident light.The results show that reduction of the metal film thickness will result in rapid transmission bandwidth reduction to a lower transmission rate.Moreover,the incident light angle changes as the efficiency of light transmission varies.The results are significant of nanoplasma polarization couple of semiconductor equipment research.

作者朱君李志全

机构地区广西师范大学电子工程学院燕山大学电气工程学院

出处《光子学报》 EI CAS CSCD 北大核心 2014年第10期207-210,共4页 Acta Photonica Sinica

基金 The National Natural Science Foundation of China(No.60877047) The Natural Science Foundation of Shanxi Province(No.F20100002002)

关键词表面等离子体带状波导仿真光栅金属薄膜 Surface plasmon polariton Strip waveguide Surface plasmon Simulation grating Metal film

分类号 TB383.1 [一般工业技术—材料科学与工程]

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