浅述射频微波集成电路在片去嵌技术

Introduction to RF and Microwave IC On-Wafer De-Embedding Technique

本文介绍了用于射频微波集成电路在片测试的去嵌技术,包括开路去嵌法、开路短路去嵌法以及焊盘开路短路去嵌法,比较了常用的开路去嵌法和开路短路去嵌法的去嵌结果以及两种去嵌方法的适用范围。

The de-embedding techniques for RF and microwave integrated circuits on-wafer measurement, Open De-Embedding Method, Open-Short De-Embedding Method and Pad-Open-Short De-Embedding Method, are introduced in the paper. The de-embedding results and scope of application of Open De-Embedding Method and Open-Short De-Embedding Method are compared.