基于显微拉曼光谱的金刚石非晶层厚度检测方法

Nondestructive measurement of amorphous layers in single-crystal diamond surface by laser microraman spectroscopy

提出了利用激光共聚焦显微拉曼光谱仪测试非晶层厚度的方法。以单晶区与非晶区的拉曼峰值比值为研究对象,研究发现此值与非晶层厚度具有较好的相关性。方法为非晶层测量提供了一种快速、无损、廉价的定量检测途径。实验证明,对于厚度小于50 nm的非晶层,方法检测误差小于1.5 nm。

Laser micro-Raman spectroscopy was used to examine single-crystal diamond bombarded by focus ion beam （FIB）. It was found that near-surface amorphous layers were generated by FIB milling process and there was a strong correlation between the thickness of the amorphous layer and the Raman intensity ratio of the amorphous phase to the crystalline phase. This finding provides the feasibility of a fast, nondestructive, quantitative and inexpensive measurement approach for subsurface damages of diamond by using laser micro- Raman spectroscopy. The effective measurement range was experimentally investigated. For the less than 50 nm thickness amorphous layer, the measurement error is less than 1.5 nm.