AZO-SiO_2-Si材料中二维侧向光伏效应的研究

Two Dimensional Lateral Photovoltaic Effect of AZO-SiO_2-Si Materials

采用旋转涂覆法在被氧化的硅基底片上形成掺铝氧化锌(AZO)薄膜,再经过真空烘干后制成AZO-Si O2-Si金属氧化物-氧化物-半导体材料样品。使用波长785 nm、功率5 m W的激光在二维方向上扫描样品,绘制出侧向光伏与激光照射点的关系曲线图,研究其二维侧向光伏效应。激光沿一定轨迹扫描金属氧化物-氧化物-半导体结构样品后,利用Origin软件将测得的实验数据拟合成实验结果图。为了更深层次的研究AZO-Si O2-Si结构中的侧向光伏效应,根据电子跃迁、载流子扩散和能带结构理论,结合前人的研究成果建立物理模型。研究显示,作为一种新型的高精度传感器,样品电极点连线区间内测得的侧向光伏曲线灵敏度为90.35 m V·mm-1、线性相关系数为0.9987,因而AZO-Si O2-Si结构可以用作高精度位移传感器(PSD)。实验结果显示激光扫描线偏离电极连线时,线性相关系数和灵敏度都会减小。在垂直于电极连线方向上,虽然侧向光伏曲线没有良好的线性相关性和较高的灵敏度,却具有高度的对称性,AZO-Si O2-Si结构可以用作距离校准传感器(RCD)。

An AZO（ Al-doped Zn O） film was formed on oxidized silicon substrate by the method of spin coating,and a sample with AZO-Si O2-Si metal oxide-oxide-semiconductor material was fabricated after the film was vacuum dried. To investigate the two dimensional lateral photovoltaic effect,the sample was scanned by 780 nm and 5 m W laser in two dimensional orthogonal directions,and curves of the two-dimensional lateral photovoltaic（ LPV） were plotted. Data modeling by Origin displayed experimental results in pictures after the laser scanning was done. For the further study of the LPV in AZO-Si O2-Si structure,the physical model on the base of electron transition,carrier diffusion and energy band structure theory was proposed. The results indicated that linear correlation coefficient and sensitivity of the lateral photovoltaic curve between the two electrodes were 0. 9987 and 90. 35 m V·mm^- 1,respectively,so the structure had a great prospect as position sensitive detector（ PSD）. As a novel high sensitivity detector,it was found that the linear correlation coefficient and sensitivity decreased while the laser scanning tracks deviated from the line connecting the two electrodes. In addition,in spite that the linear correlation coefficient and sensitivity were low in the direction that was perpendicular to the line connecting the two electrodes,the lateral photovoltaic curves were significantly symmetrical,so the structure could also be used as range calibration detector（ RCD）.