克林贝格三维线性测头的结构分析

Structural Characteristics Analysis of Klingelnberg 3D Scanning Probe

详细分析了克林贝格三维线性测头(K3D)结构具有三个轴向运动质量、偏转力和偏转刚度相等,且动态特性一致的结构特点,并对其三个方向的偏转结构、"共平面"结构以及主动测量结构着重进行了结构分析,其"共平面"结构极大地减小了在XZ-平面的阿贝误差,并通过一对梯形双轴铰链杆将沿探针轴向的偏转位移转移到测头后部进行测量,设计非常巧妙,克服了三层嵌套式结构三轴向偏转运动质量不相等的缺点,另外在直角双轴杆处设计了一个可分离的主动测量机构使得测头具备主动向任意方向偏转测量的主动测量功能。

This paper analyzes Klingelnberg K3D probe system architecture has three axially moving mass,equal to the deflection force and a deflection stiffness and dynamic characteristics consistent with the structural characteristics,and the deflection of the three directions of its body,＆quot;coplanar＆quot;mechanism,and active measuring mechanism for a structural analysis focused on,the ＆quot;coplanar＆quot;institutional greatly reduces the Abbe error in the XZ -plane,and passed through a biaxial hinge trapezoidal lever deflection along the axial displacement of the probe transferred to the rear of the probe probe design is very clever,to overcome the disadvantage of the three nested structure that three axial deflection moving mass does not equal,another in the cartesian axis rod and designed a detachable body makes active measurement probe deflected in any direction with the initiative to measure active measurement function.