无执行机构的曲面形状精密测量装置与方法

Precision Measuring Device and Method of Non- executive Body of Curved Shape

针对目前三维表面形貌测量存在测量精度低与测量速度慢等问题,研发设计了一种无执行机构的曲面形状精密测量装置与方法,它具有测量精度高、速度快的优势。采用液晶空间光调制器改变照明角度,以及改变被测样品的探测深度,只需计算机控制即可完成,无需执行元件,测量速度快。综合运用了图像传感器成像技术和图像高清晰三维处理技术,使得整个测量过程智能化。

For existing low measurement accuracy and measurement issues such as slow speed three -dimensional surface topography measurement,research and design of a non -executive body of the curved shape of precision measuring device and method,which has high accuracy and speed advantage.Using a liquid crystal spatial light modulator to change the lighting angle,and changing the depths of the sample,only the control computer can be completed without the actua-tor,so fast measurement speed.Integrated use of the image sensor high -resolution imaging techniques and three -dimen-sional image processing technology,makes the whole measurement process intelligence.