摘要
A fully flexure micro/nano transmission platform(MNTP)which has five degrees of freedom is designed on the basis of bridge type amplification mechanism.According to the kinematic theory and the elastic beam theory,the theoretical output displacement equation of the platform is derived,and then piezoelectric actuator(PZT)is calibrated.Meanwhile,a full closed-loop control strategy of the platform is established using the feedforward proportional-integral-derivative(PID)compound control algorithm based on the Preisach model.Moreover,the total transfer function of the micro positioning system is derived,and the calculation method of output signal is acquired.Finally,the theoretical output displacement is verified by finite element analysis(FEA)and positioning experiments.
A fully flexure micro/nano transmission platform （MNTP） which has five degrees of freedom is designed on the basis of bridge type amplification mechanism. According to the kinematic theory and the elastic beam theo- ry, the theoretical output displacement equation of the platform is derived, and then piezoelectric actuator （PZT） is calibrated. Meanwhile, a full closed-loop control strategy of the platform is established using the feedforward pro- portional integral derivative （PID） compound control algorithm based on the Preisach model. Moreover, the total transfer function of the micro positioning system is derived, and the calculation method of output signal is ac- quired. Finally, the theoretical output displacement is verified by finite element analysis （FEA） and positioning ex- oeriments.
基金
Supported by the State Key Laboratory of Mechanical Transmission Independent Research Fund(SKLMT-ZZKT-2012 MS 05)
