摘要
利用动态频率扫描对叠层芯片进行激振,用双探头激光多普勒测振仪同时测量底座激振下悬臂叠层芯片底座及悬臂端速度,对比分析二者响应速度频谱获得两悬臂与底座相位差;分析悬臂共振时对底座影响及两悬臂相互作用关系,准确获得芯片悬臂端共振频率。该实验方案合理可行,对微结构动力学分析及精确数值仿真具有一定指导意义。
A two-probe Laser Doppler Vibrometer （LDV）system was used for detecting the vibrations of the cantilever and the base.The velocity spectra of the cantilever and base were comparatively analysed,and then the dimensionless frequency response of the cantilever,and the phase difference between the cantilever and base were acquired,based on which the resonant frequency of the cantilever was estimated accarately.The effect of the cantilever resonance on the base vibration and the interaction between the two cantilevers were analysed.
出处
《振动与冲击》
EI
CSCD
北大核心
2014年第22期97-100,共4页
Journal of Vibration and Shock
基金
国家重点基础研究发展计划(2009CB724203)
关键词
叠层悬臂结构
双探头激光测振
共振频率
频率响应曲线
相位差
动态频率扫描
stacked cantilever structure
two-probe laser vibrometer system
resonant frequency
frequency response curve
phase curve
dynamic frequency scanning
