基于双平面线圈驱动的GMM薄膜微泵

GMM Thin Films Micropump Based on the Double Plane Coil Driving

针对由超磁致伸缩材料驱动的微泵体积大、流量小的问题,提出了一种用于精密输液的基于双平面线圈驱动的GMM薄膜新型微泵,采用双平面螺旋线圈作为驱动部件并设计双泵腔,以减小微泵的体积、增大微泵流量。该研究对新型微泵结构原理、制备工艺和输出流量进行了分析,结果表明该新型薄膜微泵具有输出流量大、尺寸小、易于微型化、响应速度快和精度高等优越性能,为微流体机电系统的驱动提供一种新的动力装置。

For the problems of large volume and small output flow of the micropump driven by the Giant magnetostrictive material,we propose a micropump based on the giant magnetostrictive thin film driven by the double plane coil to be used for precision infusion,which adopts the double flat spiral coil as drive parts to minimize its volume,and is designed a double pump cavity to increase flow.The new micropump＇ s structural principle,processing technology,and output flow are analyzed.Results show that the new thin films micropump has advantages of large output flow,small size and easy to miniaturization,fast response speed and high precision,which provides a new power drive unit for microfluidic electromechanical systems.