Sm(Co_(bal)Ni_(0.18)Fe_(0.1)Zr_(0.04))_x的永磁薄膜性能的研究

Study on Sm(Co_(bal)Ni_(0.18)Fe_(0.1)Zr_(0.04))_x Permanent Magnetic Films

稀土永磁合金薄膜在微机电系统(MEMS)、磁记录介质、自旋电子元件和医疗科学领域有着重要的应用。Sm Co基永磁薄膜,其内禀居里温度高于其他永磁薄膜,高温条件下有更高的稳定性,因而在MEMS中具有潜在的应用前景。采用复合靶和纯钐靶共溅射制备出Sm Co基永磁薄膜样品,研究了薄膜合金中Sm含量以及退火温度等对Sm(CobalNi0.18Fe0.1Zr0.04)x相结构、微观形貌以及磁性能的影响,得出以下结论:退火温度对薄膜织构也有明显影响。随着退火温度提高,薄膜织构增强,矫顽力提高。随着Sm含量的提高,薄膜中Sm Co相析出增多,组织更加均匀,矫顽力明显提高。

The films of rare earth transition metal （RE-TM） alloys have great technological applications in the field of microelectromechanical systems （MEMS）, recording media, spintronic devices and medical science. SmCo permanent magnet films have better high temperature stability because its intrinsic curie temperature is higher than other permanent magnet films; the SmCo permanent magnet films have potential application prospect in MEMS. In this paper, Sm-Co based permanent magnetic films were prepared by co-sputtering composite targets and pure Sm targets. Effect of Sm content and annealing temperature on the film microstructure and magnetic properties of the Sm-Co films was investigated. The results indicate that： the annealing temperature plays an important role in the film texture. With the increase of the annealing temperature, the texture of the films is enhanced and the coercivity is also improved. With the increase of Sm content, the precipitation is enhanced to form uniform films, which can improve the coercivity.