期刊文献+

手动引线键合设备夹持台解决方案

The Solutions of Workholders for Manual Wire Bonders
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摘要 引线键合是半导体器件最早使用的一种互联方法,多年来一直在努力克服可靠性、可制造性及成本方面存在的缺点。因为手动键合器件的多样性,夹持台是手动键合设备中变化最为多样的部件。介绍了手动键合设备针对不同器件的夹持台解决方案。 Wire bonding is a method of the sem iconductor device interconnect earliest use,it has been working to overcome the disadvantages of reliability,manufacturability and costsfor the past many years. The workholders for manual wire bonders are the most diverse parts,because thevarious-ness of thebondingdevice.This article in troduces the solutions of work holders for manual wirebonders.
出处 《电子工业专用设备》 2014年第6期27-31,共5页 Equipment for Electronic Products Manufacturing
关键词 手动键合 手动键合设备 夹持台 热夹持台 冷夹持台 Manual wire bond Manual wire bonders Workholders Hot workholders Cold workholders
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参考文献4

  • 1Rao R. Tummala, Eugene J. Rymaszewski, Alan G. KIo-pfenstein,等.微电子封装手册(第二版)[M].北京:电子工业出版社,2001.
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二级参考文献4

  • 1Harman, George G., Johnson, Christian E. Wire bonding to advanced copper, low-k integrated circuits, the metal/dielectric stacks, and materials considerations[J]. IEEE Transactions on Components and Packaging Technologies, 2002,25:677-683.
  • 2ITRS. Assembly and Packaging[EB/OL]. Http://PUBLIC.Itrs.net/. ITRS 2003.
  • 3Chylak, Bob; Kumar, Suresh; Perlberg, Gil. Optimizing the wire bonding process for 35-mm ultra-fine-pitch packages[C].Proceedings of SEMICON Singapore 2001 Technical Symposium, 2001, Singapore.
  • 4Kripesh, Vaidyanathan. Wire bonding process impact on low-k dielectric material in damascene copper integrated circuits[C]. Proceedings of the 2002 Electronic Components and Technology Conference, 2002. 873-880.

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