40GHz陶瓷衬底SOLT校准片研制与定标技术研究

Research on 40GHz Al_2O_3 SOLT Calibration Substrate Design and Parameter Fitting

在片测试系统在微波单片集成电路MMIC的设计建模及生产检验中有着必不可少的作用。由于测试参考面从矢网的同轴接口转移到微波探针,因此需要用共面波导校准片校准。设计制作了用于在片测试系统校准的陶瓷衬底的SOLT校准片,并对校准片进行了建模,提取出了1~40GHz频段内片上负载及短路件的等效电阻及寄生电感参量、直通件的延时参量。片上负载的电阻分量约为45Ω,回波损耗在1~30GHz小于-20dB;在30~40GHz小于-10dB。验证了SOLT校准片设计、制作及定标的整个工艺过程的有效性。

On-wafer testing system is necessary thru the whole design/modeling and manufacture/verification process of MMIC. Coplanar waveguide calibration chip is used to calibrate the microwave probe, since the reference plane is trans- ferred from coaxial network analyzer to microwave probe. This paper designed and manufactured Al2O3 based SOLT calibra- tion substrate. The calibration chip is modeled. The load and short module＇s equivalent resistance and parasitic inductance in 1-40GHz has been analyzed, as well as the thru＇ s group delay. The load resistance is about 45Ω, return loss is below -20 dB between 1-30GHz, return loss is below -10dB between 30-40GHz. This paper demonstrates the validity of the whole SOLT calibration chip design, manufacture and calibration process.