一种电容式直线位移传感器设计与研究

Study and Design of a Capacitance Type Linear Displacement Sensor

研究一种大量程差动变面积电容测量式位移传感器。该传感器以AVR芯片ATmega8为核心芯片,以电容传感器为敏感元件,以电容数字转换芯片AD7150实现电容量采集和数字转换,以数字电流转换芯片AD420实现4-20mA工业电流输出,详述该传感器结构、特点及工作原理。通过实验数据表明：该传感器的测量精度可以达到0.1%。

In this paper, we study a large range of differential variable area capacitance displacement sensor measurement. We choose AVR the chip ATmega8 as the core chip, sensitive element for capacitance sensor, with capacitive digital conversion chip ADT150 for capacitance acquisition and digital switching, with digital current conversion chip AD420 4-20mA to generate industrial output current. We describe the sensor structure, characteristics and working principle in detail. Through the experimental data shows that the measuring accuracy ＆this sensor can reach 0.1%.