薄膜疲劳失效预测方法与损伤机制的研究进展

Research Progress of Fatigue Failure Prediction Methods and Damage Mechanism

薄膜材料的尺寸范围、结构以及其服役环境的特殊性,制约了薄膜失效行为、寿命预测及可靠性评估技术研究的开展。对薄膜疲劳寿命的预测方法进行综述,分析常用的单向循环加载法和悬臂梁弯曲法。详细介绍纳米级动态载荷法,包括连续刚度法和纳米冲击试验法,此法能够对实际服役环境更好地模拟,可以实现分相测试以及多种功能模块的原位定点检测,以及定量分析薄膜的疲劳性能。对薄膜疲劳损伤失效机制与寿命预测模型的研究进行探讨与展望,发现薄膜材料失效过程的研究与定量分析是今后研究的重点。

For a long time, because of the specific characteristics of size, structure and service environment for thin film materials, the research on the failure behavior, life prediction and reliability assessment for thin films obviously lag behind the development of the film categories and application. Fatigue life prediction methods of thin films are reviewed, and the unidirectional cyclic loading method and the cantilever beam bending method are analyzed. And a new method of fatigue life prediction, i.e. nano dynamic load method which includes the continuous stiffness method and nano-impact test method, is introduced in detail. This method can excellently simulate the actual service environment; and also can realize split-phase test, in situ fixed-point detection of various function modules, and quantitative analysis of the fatigue properties of thin films. The research status of fatigue damage mechanism and life prediction models for the thin films is discussed. The research on the failure process and the quantitative analysis will be focused for the investigation of fatigue failure mechanism of thin film materials.