KDP晶体表面残留颗粒的机器视觉检测方法研究

Attempt on Detection Method of the Residual Particles at KDP Crystal Surface Based on Machine Vision

KDP晶体是一种优质的非线性光学材料,广泛应用于激光核聚变等军工、国防领域。KDP晶体材质特殊,需采用超精密加工技术进行加工,加工过程中的杂质和抛光清洗液中的纳米级羰基颗粒容易吸附在其表面,对其光学特性影响很大。采用机器视觉技术检测晶体抛光清洗后表面残留颗粒,使用光学显微镜获取表面微观图像,经过图像存储、图像增强、边缘检测和图像分割等操作,将残留颗粒特征提取出来,然后进行图像标定、图像测量得到残留颗粒分布状态,对于评价KDP晶体清洗结果、指导清洗过程和保证晶体表面质量有重要作用。

The KDP（Potassium Dihydrogen Phosphate） crystal is widely used in the laser fusion and other areas of the military industry and national defense as a high quality non-linear optical material. KDP crystal is a special material and needs to be machined with ultra-precision technique. The impurities in the process of machining and the nanoscale carbonyl particles in the polishing cleaning fluid are adsorbed on the crystal surface easily, and the residual particles has a great influence on its optical properties.Machine vision technology is used to detect the residual particles on the crystal surface after polishing and cleaning. The crystal surface microscopic image is obtained using the optical microscope, and the residual particle characteristics is picked up after image storage, image enhancement, edge detection and image segmentation, etc. At last, the residual particle distribution is got through image calibration and image measurement. The result plays an important role in evaluating the KDP crystal cleaning result, guiding the cleaning process and ensuring the quality of crystal surface.