对棒多晶硅还原炉高频加热系统研究

Study of the High Frequency Heating Power Supply for Poly-silicon Decomposition Reactor

介绍了一种新型多晶硅还原炉加热电源的工作原理、系统构成和实验结果。该型加热电源采用相控整流和高频逆变技术。根据多晶硅硅棒在生长过程中的伏安特性,设计了与工频加热电源交互的控制逻辑以及逆变电流控制方法。通过实验验证了硅棒中交变电流的趋肤效应在多晶硅硅棒加热过程中的作用,并对比了工频加热电流与高频加热电流的幅值差异。实验表明,该型多晶硅还原炉高频加热电源在节电率、单炉生产时间和产出硅棒直径上,均比传统的工频加热电源有较大提升。

A novel poly-silicon decomposition reactor heating power supply is introduced from the aspects of working principal,system configuration and experimental results.The heating power supply configures by the phase-controlled rectifier and high frequency inverter.According to the poly-silicon U-I curve during its production, the inter-connection control and the high frequency power supply, and the control of the inverter output current are designed.Through the experiment, the skin effect of the heating current in the poly-silicon pillar is verified, different AC current＇s ampli- tude of different frequency in the heating silicon pillar are compared,the difference in the heating current amplitude with the 50 Hz and high frequency power supply, is also introduced.The experiment also demonstrates that, the high frequency heating power supply used in the reactor, bring less power consumption, shorter production time and larger silicon pillar＇s diameter, compared with the traditional 50 Hz heating power supply.