摘要
掺硼金刚石(BDD)薄膜电极具有很宽的电势窗口、很小的背景电流、很高的电化学稳定性、其电化学响应在很长时间内保持稳定以及耐腐蚀等优点。采用热丝化学气相沉积(HF—CvD)方法制备掺硼金刚石薄膜,并用金相显微镜、原子力显微镜(AFM)、X射线衍射(XRD)这三种测试方式进行表征。BDD薄膜电极在电解过程中消耗很多能量。从提高氧化效率来降低能耗的角度出发,研究了电压及电极间距对BDD薄膜电极电化学氧化效率的影响。通过实验得出电压在5~13V时电化学氧化效率会随着电压的升高而升高;电极间距在0.5~4cm时电化学氧化效率随着电极间距的增大而降低。
Boron-doped diamond (BDD) thin film electrode has a lot of advantages, such as wide potential window, small background current, high electrochemical stability, stable electrochemi- cal response in a long time and corrosion resistance. The BDD thin film was prepared by hot fila- ment chemical vapor deposition (HFCVD), and characterized by the metallographic microscope, atomic force microscopy (AFM) and X-ray diffraction (XRD). The BDD thin film electrode con- sumes a lot of energies in the electrolysis process. From the view of improving the oxidation effi- ciency and reducing energy consumption, the effects of the voltage and electrode space on the electrochemical oxidation efficiency of the BDD thin film electrode were investigated. The experi- ment results illustrate that the electrochemical oxidation efficiency increases with the increase of the voltage from 5 V to 13 V, and the electrochemical oxidation efficiency decreases with the in- crease of the electrode space from 0. 5 cm to 4 cm.
出处
《微纳电子技术》
CAS
北大核心
2014年第12期803-806,共4页
Micronanoelectronic Technology
基金
国家02重大专项资助项目(2009ZX02308-003)
关键词
掺硼金刚石(BDD)薄膜电极
电化学
氧化效率
电解电压
电极间距
boron-doped diamond (BDD) thin film electrode
electrochemical
oxidation effi-ciency
electrolysis voltage
electrode space