AFM检测金刚石刀具锋利度误差分析研究

Research on Error of Measuring Sharpness Edge of Diamond Tool Based on AFM

金刚石刀具是超精密切削的重要工具,其刃口锋利度的好坏对工件切削质量有着直接影响。基于AFM的金刚石刀具刃口锋利度检测是目前的主要方法,但是由于AFM仪器本身、扫描参数设置以及刀具状况、外界干扰等多种影响因素的作用,将导致金刚石刀具纳米级锋利度的检测产生多种误差。以圆弧刃金刚石刀具为测量对象,深入分析各个因素的影响过程,进行了理论分析和实验过程,提出了抑制和修正方法。研究表明,通过上述研究和措施的实施,可以提高锋利度的检测精度,为金刚石刀具高质量评价体系的建立提供理论和方法支持。

The diamond tools is an important tool for ultra- precision cutting machining,and the nanometer- scale sharpness edge of diamond tool has an important impact on surface quality of ultra- precision machining. The method based on Atomic Force Microscope（ AFM） to mesure the sharpness of diamond tools is primary. But,becaues of AFM itself、setting scanning parameter、diamond tool、entironment interfere and so on,which will bring in a lot of errors. For measuring arc sharpness of diamond tool,thorough analysed how to affect,worked on theory and examination,setted up restrain method. Research shows： the precision of measuring sharpness edge of diamond tool has been improved by those working on research and step,which can afford sustain about theory and method for setting up estimate system for diamond tool.