摘要
介绍了激光干涉仪的信号处理方法,分析了单频激光干涉仪中消除直流漂移的方法,双频激光干涉仪中的减法器、频率解调、相位解调技术的特点。
The signal processing technology of laser interferometer is introduced and reviewed. In the single- frequency laser interferometer,the DC drift removing technique is analyzed in detail. In the dual- frequency laser interferometer,the signal processing techniques such as subtractor,frequency demodulation,and phase demodulation are also reviewed.
出处
《工具技术》
2014年第12期80-84,共5页
Tool Engineering
关键词
激光干涉仪
鉴频器
鉴相器
细分技术
减法器
lase interferometer
frequency discriminator
phase discriminator
subdivision technology
subtractor
