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多自由度微陀螺结构参数对其动态性能影响分析 被引量：4

Analysis of the influence of the multiple degree of freedom MEMS gyroscope structural parameters on the performance
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摘要 为了解决多自由度微机械陀螺结构设计中存在的参数耦合问题,提出了一种基于增益和带宽最优化的参数设定方法。为了从结构设计和参数限定的角度提高单轴微机械振动陀螺的性能指标,分析了多自由度单轴微机械振动陀螺的参数对于陀螺性能的影响。为了抑制低频环境噪声对于输出信号的影响,陀螺的驱动需要在高频率范围内进行操作。通过理论推演得到在高操作频率下陀螺结构设计中广泛存在于峰值间隔频率、操作频率、阻尼与陀螺性能之间相互制约的内在关系。结合其设计原则,设计出的微机械陀螺带宽为200 Hz、增益提高了5 dB,能满足绝大多数工程应用的要求。 To solve the problem of structural tradeoff in multiple degrees of freedom （DOF） micro electro mechanical systems （MEMS） gyroscopes, the method of global optimization of gain and bandwidth is provided in this paper. To improve the performance of the MEMS vibratory gyroscopes from the structural design and the limitation of the parameters, the influence of parameters on the performance of the gyroscopes is analyzed. To reduce the effect of the low-frequency environmental noise on the output signal, the gyroscope needs to be driven in the high frequency region. The internal relationships between peak spacing frequency, operating frequency, damping and the performance of the gyroscope were derived by precise theoretical calculations. The proposed gyroscope is designed with the bandwidth of 200 Hz and the gain is increased by 5 dB, which can satisfy the requirements of most practical applications.
作者 郝燕玲 刘博 胡钰
机构地区 哈尔滨工程大学自动化学院
出处 《哈尔滨工程大学学报》 EI CAS CSCD 北大核心 2014年第11期1378-1383,共6页 Journal of Harbin Engineering University
基金 国家自然科学基金资助项目(61203225) 中国博士后科学基金面上资助项目(2012M510083)
关键词 多自由度 微机械陀螺 峰值间隔频率 操作频率 空气阻尼 multiple degrees of freedom micro electro mechanical systems （MEMS） peak spacing operationalfrequency damping
分类号 U666.12 [交通运输工程—船舶及航道工程]
  • 相关文献

参考文献20

  • 1WANG W, LYU X Y, SUN F. Design of a novel MEMS gy- roscope array [ J ]. Sensors - Open Access Journal, 2013, 13 : 1651-1663.
  • 2WEINBERG M, KOUREPENIS A. Error sources in in-plane silicon tuning-fork MEMS gyroscopes [ J ]. IEEE/ASME Journal of Microelectromechanical Systems, 2006, 15 : 479- 491.
  • 3NEUL R, GOMEZ U M, KEHR K, et al. Micromachined angular rate sensors for automotive applications [ J ]. IEEE Sensors Journal, 2007, 7 (2): 302-309.
  • 4GEEN J A, SHERMAN S J, CHANG J F, et al. Single-chip surface micromachined integrated gyroscope with 50 dcg/h Allan deviation [ J ]. IEEE Journal of Solid-State Circuits, 2002, 37 (12):1860-1866.
  • 5ACAR C, SHKEL A. Inherently robust micromaehined gyro- scopes with 2-DOF sense-mode oscillator [ J ]. IEEE/ASME Journal of Microelectromechanical Systems, 2006, 15 (2) : 380-387.
  • 6SCHOFIELD A R, TRUSOV A A, ACAR C, et al. Anti- phase driven rate gyro-scope with multi-degree of freedom sense mode[ C ]//Proceedings of the 14th International Con- ference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS ' 07). Lyon, France, 2007 : 1199-1202.
  • 7SCHOFIELD A R, TRUSOV A A, SHKEL A M. Multi-de- gree of freedom tuning fork gyroscope demonstrating shock rejection[ C]// Proceedings of the IEEE Sensors. Atlanta, USA, 2007: 120-123.
  • 8ACAR C, SHKEL A. Nonresonant micromachined gyro- scopes with structural mode-decoupling [ J ]. IEEE Sensors Journal, 2003, 3(4): 497-506.
  • 9JEON S H, LEE J Y, JUNG H K, et al. Two-mass system with wide bandwidth for SiOG ( silicon on glass) vibratory gyroscopes [ C ]/! Proceedings of International Conference of Solid State Sensors and Actuators Microsystem. Seoul, Kore- a, 2005: 539-542.
  • 10WEINBERG M, KOUREPENIS A. Error sources in in- plane silicon tuning-fork MEMS gyroscopes [ J ]. Micro- electromechine System, 2006, 15 (3) : 479-491.

二级参考文献78

  • 1陈伟平,韩天,王浩,陈宏,刘晓为.一种双自由度双级解耦微机械陀螺的特性分析[J].传感技术学报,2007,20(11):2391-2394. 被引量：1
  • 2YOO J H, MARSCHNER U, FLATAU A B. Preliminary Galfenol vibratory gyro-sensor design [C] //Proceedings of SPIE. San Diego, CA, USA , 2005, 5764: 111- 119.
  • 3AYAZI F, NAJAFI K. A HARPSS polysilicon vibrating ring gyroscope [J].Microelectromechanical Systems, 2001, 10 (2): 169- 179.
  • 4GEIGER W, BUTT W U, DEWXH J, et al. Deeoupled microgyroscopes and the design principle DAVED [J]. Sensors Actuators: A, 2002, 95 (2): 239-249.
  • 5YAZDI N, AYAZI F, NAJAFI K. Mieromachined inertial sensors[J].Proceedings of the IEEE, 1998, 86 (8): 1640- 1659.
  • 6GREIFF P, BOXENHORN B, KING T, et al. Silicon monolithic micromechanical gyroscope [C] //Proceedings of the 1991 International Conference on Solid-State Sensors and Actuators. SanFranciseo, CA, USA, 1991: 966-968.
  • 7BERNSTEIN J, CHO S, KING A T, et al. A micromachined comb-drive tuning fork rate gyroscope [C] // Proceedings of Micro Electro Mechanical Systems. Fort Lauderdale, FL, 1993: 143-148.
  • 8LIU K, ZHANG W P, CHEN W Y, et al. The development of micro-gyroscope technology[J]. Journal of Micromeeha- nics and Microengineering, 2009, 19 (11): 113001.
  • 9ACAR C, SHKEL A M. Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement [J]. Journal of Micromechanics and Microengineering, 2005, 15 (5).. 1092-1101.
  • 10ALPER S E, SILAY K M, AKIN T. A low-cost rate-grade nickel micro-gyroscope [J]. Sensors and Actuators: A, 2006, 132 (1): 171-181.

共引文献45

同被引文献33

  • 1王群京,李争,夏鲲,姜卫东,赵涛.新型永磁球形步进电动机结构参数及转矩特性的计算与分析[J].中国电机工程学报,2006,26(10):158-165. 被引量：25
  • 2高嵘,王小静,张效翔,王敏,于茂华,谢明春.计入空气阻尼的MEMS微谐振器非线性动力学研究[J].传感技术学报,2006,19(05A):1354-1357. 被引量：6
  • 3LIANG Yan, CHEN I-Ming, SON Hungsun, et al. Analysis of pole configurations of permanent-magnet spherical actuators [ J ]. IEEE/ASME Trar~sactions on Mechatronics, 2010, 15 (6) : 985 - 989.
  • 4YONGSU Urn, TOMOJAKI Yano. Characteristic of torque on spherical stepping motor based on hexahedron-octahedron struc- ture[ C ]//IEEE International Conference on Mechatronics and Automation, August 9 - 12, 2009, Changchun, China. 2009: 170 - 175.
  • 5WANG J, JEWELL G W, HOWE D. Modeling of a novel spheri- cal permanent magnet actuator [ C ]//IEEE International Confer- ence on Robotics and Automation, April 20 -25, 1997, Albu- querque, USA. 1997. 2: 1190-1195.
  • 6KAHLEN K, VOSS I, DE DONKER R W. Control of multi-di- mensional drives with variable pole pitch [ C ]//IEEE Industry Ap- plications Conferences, October 13-18,2002, Pittsburgh, USA. 2002, 4 : 2366 - 2370.
  • 7LIANG Yan, CHEN I-Ming, LIM C K. Design and analysis of a permanent magnet spherical actuator[ J]. IEEE/ASME Transac- tions on Mechatronics. 2008. 13(2) : 239 -248.
  • 8DEHEZ B, GALARY G, GRENIER D, et al. Development of a spherical induction motor with two degrees of freedom [ J ]. IEEETransactions on Magnetics, 2006, 42 ( 8 ) : 2077 - 2089.
  • 9ONER Yusuf, ALTINTAS Ahmet. Computer aided design and 3D magnetostatie analysis of a permanent magnet spherical motor [ J ]. Journal of Applied Science, 2007, 7 (22) : 3400 - 3409.
  • 10LEE Kokmeng, SON Hungson. Distributed multipole models for design and control of PM actuators and sensors[J]. IEEE/ASME Transaetions on Meehatronies, 2008, 13 (2) : 228 - 238.

引证文献4

二级引证文献10

哈尔滨工程大学学报
2014年 第11期

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