摘要
为了解决多自由度微机械陀螺结构设计中存在的参数耦合问题,提出了一种基于增益和带宽最优化的参数设定方法。为了从结构设计和参数限定的角度提高单轴微机械振动陀螺的性能指标,分析了多自由度单轴微机械振动陀螺的参数对于陀螺性能的影响。为了抑制低频环境噪声对于输出信号的影响,陀螺的驱动需要在高频率范围内进行操作。通过理论推演得到在高操作频率下陀螺结构设计中广泛存在于峰值间隔频率、操作频率、阻尼与陀螺性能之间相互制约的内在关系。结合其设计原则,设计出的微机械陀螺带宽为200 Hz、增益提高了5 dB,能满足绝大多数工程应用的要求。
To solve the problem of structural tradeoff in multiple degrees of freedom (DOF) micro electro mechanical systems (MEMS) gyroscopes, the method of global optimization of gain and bandwidth is provided in this paper. To improve the performance of the MEMS vibratory gyroscopes from the structural design and the limitation of the parameters, the influence of parameters on the performance of the gyroscopes is analyzed. To reduce the effect of the low-frequency environmental noise on the output signal, the gyroscope needs to be driven in the high frequency region. The internal relationships between peak spacing frequency, operating frequency, damping and the performance of the gyroscope were derived by precise theoretical calculations. The proposed gyroscope is designed with the bandwidth of 200 Hz and the gain is increased by 5 dB, which can satisfy the requirements of most practical applications.
出处
《哈尔滨工程大学学报》
EI
CAS
CSCD
北大核心
2014年第11期1378-1383,共6页
Journal of Harbin Engineering University
基金
国家自然科学基金资助项目(61203225)
中国博士后科学基金面上资助项目(2012M510083)
关键词
多自由度
微机械陀螺
峰值间隔频率
操作频率
空气阻尼
multiple degrees of freedom
micro electro mechanical systems (MEMS)
peak spacing
operationalfrequency
damping