摘要
本文对微机电系统(MEMS)的微通道冷却、微射流冲击冷却、微喷雾冷却、微热管冷却及半导体冷却技术的研究现状进行综述,并探讨了喷雾冷却的影响因素、传热机制及过程强化问题。
In this paper, present research situations of micro channel cooling, micro jet impingement cooling, micro spraying cooling, micro heat pipe cooling and semiconductor cooling in micro electro mechanical systems （MEMS） have been briefly reviewed. In addition, influence factors, heat transfer mechanism and intensification of spraying cooling process have been also explored.
关键词
微机电系统
微冷却技术
喷雾冷却
强化
micro electro mechanical systems
micro cooling technology
spraying cooling
intensification
