摘要
磁悬浮系统利用电磁铁实现悬浮体的悬浮控制,电磁铁与悬浮体之间的电磁力大小与两者之间的磁场气隙密切相关,磁场气隙的高精度检测关系到悬浮控制性能的好坏。提出了一种基于隧道型磁阻(TMR)传感器阵列的气隙磁场检测方案,采用体积小、灵敏度高、测量精度高的TMR传感器作为磁传感元件,同时在气隙磁场中进行传感器的多点布控,利用传感器阵列来检测气隙磁场的分布。基于该方案研制了磁场检测实验系统进行测试验证,重点介绍了实验系统中标准磁场的建立和磁屏蔽结构设计。实验结果表明:基于TMR传感器阵列的气隙磁场检测方案经测试取得了较好的结果,补偿后的测量不确定度可以达到±0.5%FS。
Magnetic levitation system generally uses electromagnet to realize suspension control of suspended substance, electromagnetic force between electromagnet and suspended substance is closely related to its air-gap of magnetic field, high-precision de^ection of magnetic field gap concern suspension control performance. A magnetic field air-gap detection solution based on TMR array is put forward. Choose small size, high sensitivity, high precision TMR as magnetic sensing component,multiple spot is carried out in air-gap magnetic field to detect the whole air-gap magnetic field distribution by sensor array. Based on the solution, develop magnetic field detection experimental system to carry out test verification,focus on establishment of standard magnetic field and design of magnetic shielding structure. The experimental results show that the air-gap magnetic field detection solution based on TMR is proved to acquire good result, measurement uncertainty after compensation may reach to ±0.5 % FS.
出处
《传感器与微系统》
CSCD
2015年第1期51-53,59,共4页
Transducer and Microsystem Technologies
