离子液体图案化表面制备及胶体探针法实验研究

Experimental study on fabrication and colloidal probe method of a nanotextured surface with lonic liquid self-assembled monolayers

介绍一种新型表面黏着力可控的表面的制备方法,通过局部阳极氧化结合离子液体离子交换技术,在纳米尺度下制备复合图案化织构表面以及测量其表面力学特征。采用基于导电原子力显微的局部阳极氧化技术制备出各种形状和尺寸的纳米二氧化硅图案阵列,利用自组装技术对织构化图案进行分子自组装。通过对表面离子液体分子自组装薄膜的表面阴离子进行离子交换就可以对表面黏着力进行控制。另外,采用新颖的胶体探针技术对实际的复合表面的黏着力学进行表征。表征参数数据表明该实验方法能普遍用于半导体基底表面改性。

This article introduces a novel method,which presents to fabricate a wetting and adhesion-controlled surface by means of local anodic oxide（LAO）lithography combined with ion exchange of ionic liquid.The nanometer-sized textures are fabricated using a conductive atomic force microscopy based LAO approach.The room temperature ionic liquid molecules are then self-assembled onto the matrix layer of silicon dioxide texture.The wetting and adhesive force of the surface is controlled by the formation of a self-assembled monolayer modified texture substrate and ion exchange on the surface.In addition,the adhesive characterization of ionic liquid and texture layers is investigated with a home-made colloidal probe.The characterization data parameters exhibit that the method can be potentially used in semiconductor substrate surface modification in MEMS application.