二氧化钛薄膜的制备及性能研究

Preparation and Properties Research of TiO_2 Thin Film

二氧化钛具有无毒、光催化性能强,热稳定和化学结构稳定,耐腐蚀性能良好等特点,可作为半导体催化材料和耐腐蚀材料。二氧化钛薄膜可以采用物理的方法和化学的方法制备,薄膜态材料在未来将有着潜在的应用。本文结合近年来二氧化钛薄膜的研究进展,介绍了二氧化钛薄膜的制备方法和应用领域,并对未来二氧化钛薄膜的研究进行了展望。

Titanium dioxide was non toxic, photocatalytic, stable thermal and chemical properties and corrosion resistance, which can be used as semiconductor photocatalytic materials and corrosion resistance materials. Titanium dioxide thin films can be prepared by physics and chemical methods. Thin film materials had potential application in the future. The research progress of TiO2 thin film was summarized. The preparation and application of TiO2 thin film were discussed. The study of TiO2 in the future was forecasted.