六氟-1,3-丁二烯的提纯方法及应用优势

Purification Methods For Hexafluoro-1,3-Butadiene And its Application Advantages

介绍了六氟-1,3-丁二烯的性质、纯化技术以及与传统含氟刻蚀气体刻蚀性能的比较。六氟-1,3-丁二烯是一种新型的电子气体,主要应用于超大规模集成电路的干法刻蚀方面。优越的刻蚀性能和优良的环境性能使其成为具有发展前景的下一代刻蚀气体。

The properties of hexafluoro-1,3-butadiene and its purification methods and the comparison of etching properties with traditional fluorine-containing etching agents are introduced in this article. Hexafluoro-1,3-butadiene is a new type of electronic gases,mainly used in large scale integrated circuit of the dry etching. Superior etching properties and excellent environmental performance make it have the prospects for the next generation of etching gas.